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                    图形化衬底DPSS

                    2014-09-02

                    2"DPSS

                    Inspection

                    Item

                    Detail

                    Spec

                    Description

                    SEM
                    Image
                    Inspection

                    Width

                    Average

                    2.70±0.15um

                    Flat-top shaped pattern not allowed

                    Unif.

                    5%

                    Height

                    Average

                    1.65±0.15um

                    Unif.

                    5%

                    Scope Inspection

                    Particle

                    50um*

                    100ea

                    No visible particle on wafer
                    The total lens should be less than 3mm

                    [50um,250um]*

                    30ea

                    [250um,500um]*

                    20ea

                    [500um,1500um]*

                    10ea

                    1500um*

                    0

                    Pattern Missing

                    50um*

                    80ea

                    The total length shoud be less than 2mm

                    [50um,250um]*

                    30ea

                    [250um,500um]*

                    15ea

                    [500um,1500um]*

                    8ea

                    1500um*

                    0

                    Pattern Fail

                    50um*

                    80ea

                    [50um,250um]*

                    30ea

                    [250um,500um]*

                    15ea

                    [500um,1500um]*

                    8ea

                    1500um*

                    0

                    Scratch

                    1.2mm

                    7ea

                    width60um and lenth1.2mm should be judged as 1ea
                    if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

                    Edge Bead

                    Edge Bead

                    1.8mm

                    The pattern failed within the 1.8mm area from the wafer edge should not be counted
                    The non-pattern area should be less than1mm from the wafer edge

                    Abnormal Shape

                    Abnormal Shape

                    3%

                    Total area of abormal shape pattern should be less than 3%

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