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                    4寸蓝宝石衬底

                    2014-09-01




                    蓝宝石晶片



                    Item


                    4"

                    Unit

                     Dimension


                    Diameter:


                    100 ± 0.15

                    mm


                    Thickness:


                    650 ± 20

                    um


                    Primary Flat:


                    301.0

                    mm

                    Orientation


                    Surface-cut:


                    C plane : Tilt 0.2°±0.1° in M axis /

                    ~


                    Primary Flat:


                    A plane : 0° ± 0.15°

                    ~

                    Flatness


                    Bow:


                     0 ~ (-10)

                    um


                    Warp:


                    20

                    um


                    Total Thickness Variation (TTV):


                    10

                    um


                    LTV


                    2.5

                    um


                    Front side Roughness


                    0.2

                    nm


                    Back side Roughness


                    0.8-1.2

                    um


                    Cleanliness


                    No particles and fingerprints

                    ~


                    4.Material Quality


                    High-purity mono-crystal Al2O3

                    ~

                     

                    5.Package


                    Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.


                    ~

                     

                    6.Trace Ability


                    Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.


                    ~

                     

                    7.Laser Mark


                    Front or Back side


                    ~

                     

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