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                    6寸蓝宝石衬底

                    2018-10-29

                    蓝宝石晶片

                    Item

                    6"

                    Unit

                     Dimension

                    Diameter:

                    150 ± 0.2

                    mm

                    Thickness:

                    1300 ± 20

                    um

                    Primary Flat:

                    47.51.0

                    mm

                    Orientation

                    Surface-cut:

                    C plane : Tilt 0.2°±0.1° in M axis /

                    ~

                    Primary Flat:

                    A plane : 0° ± 0.15°

                    ~

                    Flatness

                    Bow:

                     0 ~ (-10)

                    um

                    Warp:

                     20

                    um

                    Total Thickness Variation (TTV):

                     10

                    um

                    LTV

                    2.5

                    um

                    Front side Roughness

                    0.2

                    nm

                    Back side Roughness

                    0.8-1.2

                    um

                    Cleanliness

                    No particles and fingerprints

                    ~

                    4.Material Quality

                    High-purity mono-crystal Al2O3

                    ~

                    5.Package

                    Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

                    ~

                    6.Trace Ability

                    Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

                    ~

                    7.Laser Mark

                    Front or Back side

                    ~


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